Preparation and optical properties of SiCN thin films deposited by reactive magnetron sputtering
Li, Qiang, Wang, Yingnan, Shan, Xutao, Wang, Xuewen, Zhao, WuVolume:
28
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-017-6373-0
Date:
May, 2017
File:
PDF, 5.54 MB
english, 2017