Novel techniques and devices for in-situ...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 09 Vol. 33; Iss. 5

Novel techniques and devices for in-situ film coatings of long, small diameter tubes or elliptical and other surface contours

Hershcovitch, Ady, Blaskiewicz, Michael, Brennan, Joesph Michael, Fischer, Wolfram, Liaw, Chong-Jer, Meng, Wuzhang, Todd, Robert, Custer, Art, Dingus, Aaron, Erickson, Mark, Jamshidi, Nader, Poole, He
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4927373
Date:
September, 2015
File:
PDF, 3.76 MB
english, 2015
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