Digitally alloyed ZnO and TiO2 thin film thermistors by atomic layer deposition for uncooled microbolometer applications
T. Tilkioglu, Bilge, Bolat, Sami, Tanrikulu, Mahmud Yusuf, Okyay, Ali KemalVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4976513
Date:
March, 2017
File:
PDF, 1.13 MB
english, 2017