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The Polishing Effect of ZnO Thin Films on SAW Filters
Kadota, Michio, Kondo, Chikashi, Ikeda, Toshiaki, Kasanami, TohruVolume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.29S1.159
Date:
January, 1990
File:
PDF, 744 KB
english, 1990