Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional...

Chemistry of Materials 2017 / 04 Vol. 29; Iss. 7

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS 2 from WF 6 , H 2 Plasma, and H 2 S

Groven, Benjamin, Heyne, Markus, Nalin Mehta, Ankit, Bender, Hugo, Nuytten, Thomas, Meersschaut, Johan, Conard, Thierry, Verdonck, Patrick, Van Elshocht, Sven, Vandervorst, Wilfried, De Gendt, Stefan,
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Volume:
29
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b05214
Date:
April, 2017
File:
PDF, 4.87 MB
english, 2017
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