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Plastic deformation of membrane with mesa silicon microstructure
Jiang, Wanli, Xu, Dehui, Xiong, Bin, Wang, YuelinLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3059-0
Date:
July, 2016
File:
PDF, 1.46 MB
english, 2016