Front and back side SIMS analysis of boron-doped...

Applied Surface Science 2017 / 07 Vol. 410

Front and back side SIMS analysis of boron-doped delta-layer in diamond

Pinault-Thaury, M.-A., Jomard, F., Mer-Calfati, C., Tranchant, N., Pomorski, M., Bergonzo, P., Arnault, J.-C.
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Volume:
410
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.03.118
Date:
July, 2017
File:
PDF, 813 KB
english, 2017
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