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Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas
Wilczek, Sebastian, Trieschmann, Jan, Eremin, Denis, Brinkmann, Ralf Peter, Schulze, Julian, Schuengel, Edmund, Derzsi, Aranka, Korolov, Ihor, Hartmann, Peter, Donkó, Zoltán, Mussenbrock, ThomasVolume:
23
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4953432
Date:
June, 2016
File:
PDF, 3.28 MB
english, 2016