Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 09 Vol. 33; Iss. 5
Diameter dependent thermal sensitivity variation trend in Ni/4H-SiC Schottky diode temperature sensors
Kumar, Vibhor, Pawar, Shuvam, Maan, Anup S., Akhtar, JamilVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929890
Date:
September, 2015
File:
PDF, 1.68 MB
english, 2015