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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Observation of fs-laser spallative ablation using soft X-ray laser probe
Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Nishikino, Masaharu, Hasegawa, Noboru, Tomita, Takuro, Minami, Yasuo, Eyama, Takashi, Kakimoto, Naoya, IzutsuVolume:
10091
Year:
2017
Language:
english
DOI:
10.1117/12.2255725
File:
PDF, 519 KB
english, 2017