Chemical vapor deposition of Mn x...

Chemical vapor deposition of Mn x N y films from bis(2,2,6,6-tetramethylpiperidido)manganese(II) and ammonia

Mohimi, Elham, Trinh, Brian B., Babar, Shaista, Girolami, Gregory S., Abelson, John R.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4964839
Date:
November, 2016
File:
PDF, 810 KB
english, 2016
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