![](/img/cover-not-exists.png)
Chemical vapor deposition of Mn x N y films from bis(2,2,6,6-tetramethylpiperidido)manganese(II) and ammonia
Mohimi, Elham, Trinh, Brian B., Babar, Shaista, Girolami, Gregory S., Abelson, John R.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4964839
Date:
November, 2016
File:
PDF, 810 KB
english, 2016