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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Research on optimal process parameters in thermally oxidation-assisted polishing of reaction-sintered silicon carbide
Jiang, Wenhan, Yang, Li, Riemer, Oltmann, Li, Shengyi, Wan, Yongjian, Shen, Xinmin, Yamamura, Kazuya, Zhang, Xiaonan, Zhang, Xiangpo, Wang, Dong, Peng, KangVolume:
9683
Year:
2016
Language:
english
DOI:
10.1117/12.2241519
File:
PDF, 2.35 MB
english, 2016