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Electron Beam Lithography Double Step Exposure Technique for Fabrication of Mushroom-Like Profile in Bilayer Resist System
Kornelia, Indykiewicz, Bogdan, Paszkiewicz, Tomasz, Szymański, Regina, PaszkiewiczVolume:
65
Language:
english
Journal:
Journal of Electrical Engineering
DOI:
10.2478/jee-2014-0062
Date:
January, 2015
File:
PDF, 397 KB
english, 2015