Study of indium catalyst thickness effect on PECVD-grown...

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Journal of Materials Science: Materials in Electronics 2017 / 3

Study of indium catalyst thickness effect on PECVD-grown silicon nanowires properties

Tabassi, M. Yaacoubi, Zaghouani, R. Benabderrahmane, Khelil, M., Khirouni, K., Dimassi, W.
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-017-6722-z
Date:
March, 2017
File:
PDF, 2.21 MB
english, 2017
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