Distribution and properties of oxide precipitates in...

Distribution and properties of oxide precipitates in annealed nitrogen doped 300 mm Si wafers

Akhmetov, V. D., Richter, H., Seifert, W., Lysytskiy, O., Wahlich, R., Müller, T., Reiche, M.
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Volume:
27
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2004084
Date:
July, 2004
File:
PDF, 475 KB
english, 2004
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