[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - A Novel Method for Simultaneous on Wafer Level Monitoring of Ion Implantation Energy and Dose
Jelinek, Moriz, Lugger, Mario, Siedl, Nicolas, Schustereder, Werner, Krueger, Christian, Wagner, MathiasYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882845
File:
PDF, 261 KB
english, 2016