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[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Annealing Behavior of Aluminum Implanted Germanium
Onoda, Hiroshi, Nakashima, Yoshiki, Nagayama, Tsutomu, Sakai, Shigeki, Joshi, Abhijeet, Zaima, ShigeakiYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882849
File:
PDF, 1.15 MB
english, 2016