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[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Development of Plasma Flood Gun for Gen 5.5 Implanter
Nagao, Tomokazu, Hayakawa, Taro, Takahashi, Genki, Inouchi, Yutaka, Tatemichi, JunichiYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882862
File:
PDF, 1.57 MB
english, 2016