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[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Dopant Activation and Deactivation Phenomena during Advanced Millisecond Anneal Cycles
Timans, P. J., Hagedorn, M., Pfahler, C., Cosceev, A., Rubin, L., Zwissler, M., Joshi, A.Year:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882864
File:
PDF, 322 KB
english, 2016