[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - EnrichedPLUS 72Germanium Tetrafluoride (EnPLUS 72GeF4) and Hydrogen (H2) Mixture for Implanter Performance Improvement
Chambers, Barry, Tang, Ying, Bishop, Steve, Morel, Thomas, Biossat, Marc, Sweeney, JosephYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882869
File:
PDF, 759 KB
english, 2016