[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Low Temperature Graphene Film Formation with Ethane Cluster Ion Implantation
Toyoda, Noriaki, Yamada, IsaoYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882889
File:
PDF, 377 KB
english, 2016