[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Sheet Resistance Dependence on Ion Angle Deviation
Kawasaki, Yoji, Tsukahara, Kazutaka, Sano, Makoto, Kawatsu, Sho, Koike, Masazumi, Kariya, Hiroyuki, Kabasawa, MitsuakiYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882905
File:
PDF, 464 KB
english, 2016