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[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Spatial Distribution of Multicharged Ions from Space Potentials Measured by Probe and Beam Methods on ECRIS
Kato, Yushi, Nishiokada, Takuya, Nagaya, Tomoki, Hagino, Shogo, Otsuka, Takuro, Watanabe, Takuto, Tsuda, YutoYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882907
File:
PDF, 1.64 MB
english, 2016