[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Thermal Stability of Cobalt Silicide on Polysilicon Implanted with Germanium
Ko, Zong-Jie, Liao, Jeng-Hwa, Lin, Hsin-Ju, Hsieh, Jung-Yu, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-YuanYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882913
File:
PDF, 280 KB
english, 2016