[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - UpTime® Si2H6/SiF4 Mix for High Productivity Si Implant
Sinha, Ashwini K., Heiderman, Doug C., Chiu, Robin, Koo, Bon-Woong, Sporleder, David, Smith, Stanley M., Sinclair, FrankYear:
2016
Language:
english
DOI:
10.1109/IIT.2016.7882915
File:
PDF, 634 KB
english, 2016