Fluence-dependent sputtering yield of micro-architectured...

Applied Surface Science 2017 / 06 Vol. 407

Fluence-dependent sputtering yield of micro-architectured materials

Matthes, Christopher S.R., Ghoniem, Nasr M., Li, Gary Z., Matlock, Taylor S., Goebel, Dan M., Dodson, Chris A., Wirz, Richard E.
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Volume:
407
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.02.140
Date:
June, 2017
File:
PDF, 5.56 MB
english, 2017
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