![](/img/cover-not-exists.png)
Investigation of chemical tooth mechanism in chemical mechanical planarization of germanium
Gupta, Apeksha, Victoria, S. Noyel, Manivannan, R.Volume:
112
Language:
english
Journal:
Tribology International
DOI:
10.1016/j.triboint.2017.03.029
Date:
August, 2017
File:
PDF, 1.13 MB
english, 2017