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Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
Dendooven, Jolien, Solano, Eduardo, Minjauw, Matthias M., Van de Kerckhove, Kevin, Coati, Alessandro, Fonda, Emiliano, Portale, Giuseppe, Garreau, Yves, Detavernier, ChristopheVolume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4967711
Date:
November, 2016
File:
PDF, 12.03 MB
english, 2016