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Intermixing and thermal oxidation of ZrO 2 thin films grown on a-Si, SiN, and SiO 2 by metallic and oxidic mode magnetron sputtering
Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. E., Bijkerk, F.Volume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4978367
Date:
March, 2017
File:
PDF, 2.91 MB
english, 2017