Study of PSG Thickness Uniformity Influencing Factors in...

Key Engineering Materials 2015 / 5 Vol. 645-646

Study of PSG Thickness Uniformity Influencing Factors in LPCVD

Lü, Wen Long, Zhan, Zhan, Du, Xiao Hui, Zhou, Ru Hai, Zhang, Hao Er, Wang, Ling Yun, Sun, Dao Heng
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Volume:
645-646
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.645-646.3
Date:
May, 2015
File:
PDF, 883 KB
english, 2015
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