Sputter deposition of Titanium and Nickel thin films in radio frequency magnetron discharge characterized by optical emission spectroscopy and by Rutherford backscattering spectrometry
Salhi, M., Abaidia, S.E.K., Mammeri, S., Bouaouina, B.Volume:
629
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.03.032
Date:
May, 2017
File:
PDF, 1.04 MB
english, 2017