Electrical characterization of atomic layer deposited Al 2 O 3 /InN interfaces
Jia, Ye, Dabiran, Amir M., Singisetti, UttamVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4936928
Date:
January, 2016
File:
PDF, 2.51 MB
english, 2016