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Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography
Rößler, Florian, Lang, Valentin, Günther, Denise, Lasagni, Andrés FabiánLanguage:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201600855
Date:
February, 2017
File:
PDF, 934 KB
english, 2017