Copper surface morphology developed in a magnetron...

Copper surface morphology developed in a magnetron sputtering system

A. Rizk, S. K. Habib, N. S. Rizk
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Volume:
24
Language:
english
Pages:
7
DOI:
10.1007/bf01174503
Date:
July, 1989
File:
PDF, 2.58 MB
english, 1989
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