Production and characterization of thin film group IIIB, IVB and rare earth hydrides by reactive evaporation
Provo, James L.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4919929
Date:
July, 2015
File:
PDF, 1.69 MB
english, 2015