Fabrication of a Tantalum-Nitride Thin-Film Resistor with a Low-Variability Resistance
Akashi, TeruhisaVolume:
125
Year:
2005
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.125.182
File:
PDF, 6.41 MB
2005