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Influence of thickness on strain state and surface morphology of AlN grown by HVPE
Sun, Maosong, Zhang, Jicai, Huang, Jun, Li, Xuewei, Wang, Linjun, Liu, Xuehua, Wang, Jianfeng, Xu, KeVolume:
37
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/37/12/123001
Date:
December, 2016
File:
PDF, 5.38 MB
english, 2016