Novel parameters to assess feature size on functional...

Surface Topography: Metrology and Properties 2013 / 10 Vol. 1; Iss. 1

Novel parameters to assess feature size on functional surfaces

Geringer, Juri, Arnecke, Philipp, Seewig, Jörg
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Volume:
1
Language:
english
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/1/1/015004
Date:
October, 2013
File:
PDF, 1.04 MB
english, 2013
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