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[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy
Afanas'ev, Victor P., Gryazev, Alexander S., Kaplya, Pavel S., Efremenko, Dmitry S., Ridzel, Olga Yu.Year:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886531
File:
PDF, 362 KB
english, 2016