Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive
Langa, S., Conrad, H., Kaiser, B., Stolz, M., Gaudet, M., Uhlig, S., Schimmanz, K., Schenk, H.Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3360-6
Date:
March, 2017
File:
PDF, 1.38 MB
english, 2017