[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Atomic layer deposition of tin oxide nanofilms using tetraethyltin
Nazarov, Denis V., Maximov, Maxim Yu., Novikov, Pavel A., Popovich, Anatoly A., Smirnov, Vladimir M.Year:
2016
Language:
english
DOI:
10.1109/BALD.2016.7886523
File:
PDF, 1.51 MB
english, 2016