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[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - Effects of Substrate Properties, Film Thickness and Evaporation Rate on the Surface Roughness of Ultra Thin Titanium Films
Han, Guoqiang, Jiang, Zhuangde, Jing, Weixuan, Zhu, MingzhiYear:
2007
Language:
english
DOI:
10.1115/mnc2007-21096
File:
PDF, 69 KB
english, 2007