Ultraviolet optical properties of aluminum fluoride thin films deposited by atomic layer deposition
Hennessy, John, Jewell, April D., Balasubramanian, Kunjithapatham, Nikzad, ShoulehVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935450
Date:
January, 2016
File:
PDF, 1.11 MB
english, 2016