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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 28 January 2017)] Oxide-based Materials and Devices VIII - Fluorine and oxygen plasma influence on nanoparticle formation and aggregation in metal oxide thin film transistors
Teherani, Ferechteh H., Look, David C., Rogers, David J., Mądzik, Mateusz, Elamurugu, Elangovan, Viegas, JaimeVolume:
10105
Year:
2017
Language:
english
DOI:
10.1117/12.2253667
File:
PDF, 900 KB
english, 2017