Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3...

ECS Transactions 2016 / 09 Vol. 75; Iss. 6

Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2

Creyghton, Y., Illiberi, A., Mione, A., van Boekel, W., Debernardi, N., Seitz, M., van den Bruele, F., Poodt, P., Roozeboom, F.
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Volume:
75
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07506.0011ecst
Date:
September, 2016
File:
PDF, 516 KB
english, 2016
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