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Reactive deposition of tungsten and titanium carbides by induction plasma
X. L. Jiang, F. Gitzhofer, M. I. Boulos, R. TiwariVolume:
30
Language:
english
Pages:
5
DOI:
10.1007/bf01184581
Date:
May, 1995
File:
PDF, 1.36 MB
english, 1995