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Observation of a periodic runaway in the reactive Ar/O 2 high power impulse magnetron sputtering discharge
Shayestehaminzadeh, Seyedmohammad, Arnalds, Unnar B., Magnusson, Rögnvaldur L., Olafsson, SveinnVolume:
5
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4936850
Date:
November, 2015
File:
PDF, 922 KB
english, 2015