Ultra-smooth e-beam evaporated amorphous silicon thin films...

Materials Letters 2017 / 06 Vol. 197

Ultra-smooth e-beam evaporated amorphous silicon thin films – A viable alternative for PECVD amorphous silicon thin films for MEMS applications

Joseph, Jose, Singh, Shiv Govind, Vanjari, Siva Rama Krishna
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Volume:
197
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2017.03.158
Date:
June, 2017
File:
PDF, 1.02 MB
english, 2017
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