AIP Conference Proceedings [AIP PHYSICS OF SEMICONDUCTORS:...

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AIP Conference Proceedings [AIP PHYSICS OF SEMICONDUCTORS: 30th International Conference on the Physics of Semiconductors - Seoul, (Korea) (25–30 July 2010)] - Ne[sup +] ion sputtering effect on amorphous Ga-In-Zn-O thin-film surface investigated by high-resolution XPS

Kang, Se-Jun, Lee, Mi Ji, Baik, Jae Yoon, Kim, Hyeong-Do, Thakur, Anup, Shin, Hyun-Joon, Chung, JaeGwan, Lee, Eunha, Lee, Jaecheol, Lee, JaeHak, Ihm, Jisoon, Cheong, Hyeonsik
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Year:
2011
Language:
english
DOI:
10.1063/1.3666286
File:
PDF, 451 KB
english, 2011
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