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[IEEE 2017 30th International Conference on VLSI Design and 2017 16th International Conference on Embedded Systems (VLSID) - Hyderabad, India (2017.1.7-2017.1.11)] 2017 30th International Conference on VLSI Design and 2017 16th International Conference on Embedded Systems (VLSID) - Hybrid OPC Technique for Fast and Accurate Lithography Simulation
Kumar, Pardeep, Srivatsa, S., Mantripragada, P., Upreti, S., Shravya, K. V.Year:
2017
Language:
english
DOI:
10.1109/VLSID.2017.49
File:
PDF, 649 KB
english, 2017